ASU NanoFab is a flexible nano-processing facility at Arizona State University that offers state-of-the-art device processing and characterization tools for university research and for external company prototype development. Established companies and innovative start-ups especially can benefit from using this advanced facility to accelerate their prototype development. We provide the facility, equipment and resources for a full range of operations—from the wet world of biosystems and chemistry to the dry world of inorganic materials, as well as the hybrid structures in between.
Our core strengths are nanofabrication, unique silicon processing, molecular- and bio-electronics, micro-electro-mechanical-systems (MEMS), nano-fluidics, optoelectronics and device characterization. Users of the facility can also take advantage of the skilled staff, several of whom have more than 25 years of experience in this area.
Whatever your requirements—from single molecule fabrication to systems on a chip and beyond—ASU NanoFab can enable and enhance your research and development needs. The NanoFab utilizes an advisory committee for both operational and strategic advice. Begun in 1981, this facility, serving the Southwest, was one of the ten nanofabs affiliated with the NNIN initiative.
Fill out the form below if you want to discuss or use ASU NanoFab for specific nanostructure research or prototyping.
HT Probe station with IV or CV measurements, LCR Station, Probe station ERC127
Metal deposition tools and techniques, E-beam evaporation, thermal evaporation, sputtering
JOEL, 25nm resolution, mask design, write times, PR recommendations
Optical and Profilometry In-Line Metrology, Optical microscopy, FESEM & EDAX Analysis
Etch tools, RIE, RPRIE, Plasma etching or cleaning, equipment & instructions, materials, recipes
Optical Lithography Tools, Masks, Photo Resists, PR Process details (e.g. thickness, exposure, develop, bake)
Tool, current sources, typical process, references
Cleaning (Piranha, SC1, SC2) or Solvent cleaning, wet chemical etching (Al, Cr, SiO2, Si, Si3N4, KOH)
From grade school students and their families to industrial and academic research professionals—we’ve got a place for everyone. Connect with ASU NanoFab to get involved with our research efforts or to enhance your own.